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1996X-Yテーブルの位置決め : 高速化のための速度制御法石田, 学; 木脇, 久勝; 山口, 崇; Ishida, Manabu; Kiwaki, Hisakatsu; Yamaguchi, Takashi; イシダ, マナブ; キワキ, ヒサカツ; ヤマグチ, タカシ; 九州産業大学工学研究科電気工学専攻/九州産業大学工学部電気工学科/九州産業大学工学部電気工学科; /Department of Electrical Engineering, Fuculty of Engineering, Kyushu Sangyou University/Department of Electrical Engineering, Fuculty of Engineering, Kyushu Sangyou University
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