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第16号 >

Please use this identifier to cite or link to this item: http://hdl.handle.net/11178/3670

Title: マグネトロンスパッタ装置の試作
Other Titles: Trial Manufacture of Magnetron Sputtering Apparatus
Authors: 阿久根, 忠博
坂本, 進洋
渋谷, 善夫
Akune, Tadahiro
Sakamoto, Nobuyoshi
Shibuya, Yoshio
アクネ, タダヒロ
サカモト, ノブヨシ
シブヤ, ヨシオ
Issue Date: 1979
Publisher: 九州産業大学工学部
URI: http://hdl.handle.net/11178/3670
Appears in Collections:第16号

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